X-ray photoelectron spectroscopy of carbon nitride films deposited by graphite laser ablation in a nitrogen postdischarge

Abstract

Carbon nitride thin films have been deposited on silicon substrates, using a newly developed surface wave discharge/pulsed laser deposition system. Nitrogen incorporation in the films is examined by x‐ray photoelectron spectroscopy (XPS). It shows that interaction between the laser ablatedcarbon species and nitrogen atoms from the surface‐wave N2 plasma enhances the incorporation of N in the carbon nitride layers, for example, up to 19% at a deposition pressure of 2 mTorr. Increasing the deposition temperature decreases nitrogen incorporation and changes the local chemical environment of nitrogen atoms.