Insert gas entrapment in films produced by ion-assisted physical vapour deposition processes
- 1 January 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 156 (2), 265-270
- https://doi.org/10.1016/0040-6090(88)90320-3
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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