Trial to control hydrogen content in a-Si:H deposited using rare-gas-diluted silane plasmas
- 1 February 1993
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 2 (1), 23-25
- https://doi.org/10.1088/0963-0252/2/1/006
Abstract
No abstract availableKeywords
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