The degradation of ferroelectric properties of PZT thin films due to plasma damage
- 1 January 1995
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 6 (1-4), 301-307
- https://doi.org/10.1080/10584589508019373
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Platinum Etching and Plasma Characteristics in RF Magnetron and Electron Cyclotron Resonance PlasmasJapanese Journal of Applied Physics, 1993
- Reactive Ion Etching of Sputtered PbZr1-xTixO3 Thin FilmsJapanese Journal of Applied Physics, 1992
- Plasma Etching of PLT Thin Films and Bulk PLZT Using Fluorine- and Chlorine-Based GasesMRS Proceedings, 1990