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Terminal iterative learning control with an application to RTPCVD thickness control
Home
Publications
Terminal iterative learning control with an application to RTPCVD thickness control
Terminal iterative learning control with an application to RTPCVD thickness control
Jian-Xin Xu
Jian-Xin Xu
Yangquan Chen
Yangquan Chen
TL
Tong Heng Lee
Tong Heng Lee
SY
Shigehiko Yamamoto
Shigehiko Yamamoto
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30 September 1999
journal article
research article
Published by
Elsevier
in
Automatica
Vol. 35
(9)
,
1535-1542
https://doi.org/10.1016/s0005-1098(99)00076-x
Abstract
No abstract available
Keywords
ITERATIVE LEARNING CONTROL
CONVERGENCE ANALYSIS
HIGH-ORDER SCHEME
TRACKING CONTROL
TERMINAL OUTPUT TRACKING
DISCRETE-TIME LINEAR SYSTEM
RAPID THERMAL PROCESSING
RTPCVD
Cited by 109 articles