LIGA and related technologies for industrial application
- 30 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3), 785-789
- https://doi.org/10.1016/s0924-4247(97)80056-8
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Acceleration sensor with integrated compensation of temperature effects fabricated by the LIGA processSensors and Actuators A: Physical, 1994