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Electron-beam exposure profiles in polymer films for metallic film mask fabrication
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Publications
Electron-beam exposure profiles in polymer films for metallic film mask fabrication
Electron-beam exposure profiles in polymer films for metallic film mask fabrication
TK
Tadao Kato
Tadao Kato
TY
Toshihiko Yahara
Toshihiko Yahara
HN
Hidefumi Nakata
Hidefumi Nakata
KM
Kenji Murata
Kenji Murata
KN
Koichi Nagami
Koichi Nagami
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1 May 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(3)
,
934-937
https://doi.org/10.1116/1.569679
Abstract
No abstract available
Keywords
ELECTRON BEAM
Cited by 3 articles