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Dopant Transfer in Heteroepitaxial Si Layers on Sapphire Substrates
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Dopant Transfer in Heteroepitaxial Si Layers on Sapphire Substrates
Dopant Transfer in Heteroepitaxial Si Layers on Sapphire Substrates
JM
J. Mercier
J. Mercier
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1 January 1970
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 117
(6)
,
812-671
https://doi.org/10.1149/1.2407639
Abstract
No abstract available
Keywords
N/N
EPITAXIAL LAYERS
SILICON EPITAXIAL
DETERMINATION OF MOBILITY
PROFILE
Cited by 7 articles