Formation of BN by nitrogen ion implantation of boron deposits
- 1 July 1984
- journal article
- research article
- Published by Elsevier in Thin Solid Films
- Vol. 117 (1), L63-L66
- https://doi.org/10.1016/0040-6090(84)90194-9
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- Applications of ion implantation in metalsThin Solid Films, 1983
- Ion beam synthesis of cubic boron nitrideJournal of Vacuum Science & Technology A, 1983
- Temperature stimulated outgassing of N-ion implanted ironApplications of Surface Science, 1982
- The oxidation of polycrystalline boron: The interpretation of AES and ELS resultsApplications of Surface Science, 1982
- Preparation and properties of hard i-C and i-BN coatingsThin Solid Films, 1982
- Ion beam deposition of special film structuresJournal of Vacuum Science and Technology, 1981
- Chemical bonding and electronic structure of B2O3, H3BO3, and BN: An ESCA, Auger, SIMS, and SXS studyThe Journal of Chemical Physics, 1980
- Surface segregation of boron in nitrogen-strengthened stainless steelJournal of Vacuum Science and Technology, 1979
- Electron spectroscopic studies of clean and oxidized ironSurface Science, 1975