Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Soft X-ray microscopy/lithography branch line at SSRL
Home
Publications
Soft X-ray microscopy/lithography branch line at SSRL
Soft X-ray microscopy/lithography branch line at SSRL
WW
William K. Warburton
William K. Warburton
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
15 May 1980
journal article
Published by
Elsevier
in
Nuclear Instruments and Methods
Vol. 172
(1-2)
,
387-391
https://doi.org/10.1016/0029-554x(80)90668-0
Abstract
No abstract available
Keywords
RESIST
SSRL
BRANCH LINE
SEM
SOFT X RAY
SAMPLE CHAMBER
RAY MICROSCOPY/LITHOGRAPHY
MICROSCOPY/LITHOGRAPHY BRANCH
Cited by 7 articles