Photoacoustic microscopy of an integrated circuit
- 15 June 1980
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 36 (12), 953-954
- https://doi.org/10.1063/1.91662
Abstract
The in‐phase and quadrature components of a photoacoustic signal have been used to form images of an integrated circuit with ∼6 μm resolution. These photoacoustic images contain information about subsurface properties of the sample.Keywords
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