Modeling and characterization of direct-tunneling current in dual-layer ultrathin-gate dielectric films
- 29 June 2006
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 24 (4), 1785-1793
- https://doi.org/10.1116/1.2213268
Abstract
No abstract availableThis publication has 39 references indexed in Scilit:
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