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Magnetron Ion Etching of Polyimide and AZ Resist for VLSI
Home
Publications
Magnetron Ion Etching of Polyimide and AZ Resist for VLSI
Magnetron Ion Etching of Polyimide and AZ Resist for VLSI
BT
B. Tweed
B. Tweed
MB
M. Burba
M. Burba
MT
M. Tabasky
M. Tabasky
SH
S. Henck
S. Henck
RW
R. Wilson
R. Wilson
ED
E. Degenkolb
E. Degenkolb
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1 November 1988
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 135
(11)
,
2896-2899
https://doi.org/10.1149/1.2095456
Abstract
No abstract available
Cited by 5 articles