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Investigation of phase-growth kinetics during interaction of silicon single crystals and molybdenum thin films
Home
Publications
Investigation of phase-growth kinetics during interaction of silicon single crystals and molybdenum thin films
Investigation of phase-growth kinetics during interaction of silicon single crystals and molybdenum thin films
BF
B.I. Fomin
B.I. Fomin
AG
A.E. Gershinskii
A.E. Gershinskii
EC
E.I. Cherepov
E.I. Cherepov
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31 December 1977
journal article
Published by
Elsevier
in
Talanta
Vol. 24
(3)
,
192-194
https://doi.org/10.1016/0039-9140(77)80091-x
Abstract
No abstract available
Keywords
IDENTIFICATION
SILICON
MOLYBDENUM
ETCHING
ANODIC
PHASE GROWTH KINETICS
Cited by 5 articles