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The Nucleation of CVD Silicon on SiO2 and Si3 N 4 Substrates: II . The System
Home
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The Nucleation of CVD Silicon on SiO2 and Si3 N 4 Substrates: II . The System
The Nucleation of CVD Silicon on SiO2 and Si3 N 4 Substrates: II . The System
WC
W. A. P. Claassen
W. A. P. Claassen
JB
J. Bloem
J. Bloem
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1 August 1980
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 127
(8)
,
1836-1843
https://doi.org/10.1149/1.2130011
Abstract
No abstract available
Cited by 38 articles