Low-impedance thin-film polycrystalline silicon microelectrodes for extracellular stimulation and recording
- 31 October 1999
- journal article
- Published by Elsevier in Biosensors and Bioelectronics
- Vol. 14 (7), 639-649
- https://doi.org/10.1016/s0956-5663(99)00037-8
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- A cultured neuron probePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- An Extended Quantum Model for Porous Silicon FormationJournal of the Electrochemical Society, 1995
- A thin film microelectrode array for monitoring extracellular neuronal activity in vitroBiosensors and Bioelectronics, 1994
- Porous polycrystalline silicon: a new material for MEMSJournal of Microelectromechanical Systems, 1994
- Porous silicon: Quantum sponge structures grown via a self‐adjusting etching processAdvanced Materials, 1992
- Porous silicon formation: A quantum wire effectApplied Physics Letters, 1991
- Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafersApplied Physics Letters, 1990
- An experimental and theoretical study of the formation and microstructure of porous siliconJournal of Crystal Growth, 1985
- Recording action potentials from cultured neurons with extracellular microcircuit electrodesJournal of Neuroscience Methods, 1980
- Simultaneous Single Unit Recording in vitro with a Photoetched Laser Deinsulated Gold Multimicroelectrode SurfaceIEEE Transactions on Biomedical Engineering, 1979