ALE-reactor for large area depositions
- 1 March 1997
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 112, 251-254
- https://doi.org/10.1016/s0169-4332(96)01000-8
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Atomic layer epitaxy growth of doped zinc oxide thin films from organometalsApplied Surface Science, 1994