Weight loss of alumina and zirconia targets during PLD

Abstract

The weight loss due to laser-induced vaporization of alumina and zirconia is investigated both theoretically and experimentally. To calculate the weight loss of the target under laser irradiation a model is used describing the laser-induced vaporization and the dynamics of the vapour/plasma state including the absorption of laser radiation. The weight loss is not an increasing function of the fluence over the whole range but has a local maximum due to absorption of laser radiation in the plasma state. The energy deposited in the plasma state due to the absorption of laser radiation is calculated and compared to the weight loss data. Different pulse shapes of laser radiation influence the maximum value of the weight loss but leave the principal dependence on the fluence unaltered. Furthermore, it is shown that increasing the back pressure from 0.06 to 100 mbar leads to considerably smaller weight losses.