The compressive stress transition in Al, V, Zr, Nb and W metal films sputtered at low working pressures
- 1 September 1977
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 45 (2), 387-396
- https://doi.org/10.1016/0040-6090(77)90276-0
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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