Polysilicon resonant microbeam technology for high performance sensor applications
- 2 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Resonant microbeam strain transducersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Surface micromachined pressure transducersSensors and Actuators A: Physical, 1991
- Performance characteristics of second generation polysilicon resonating beam force transducersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990