Use of Diethylberyllium for Metal Organic Chemical Vapor Deposition of Beryllium‐Doped Gallium Arsenide
- 1 August 1983
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 130 (8), 1782-1783
- https://doi.org/10.1149/1.2120094