Preparation and Electrochromic Properties of RF-Sputtered NiOx Films Prepared in Ar/O2/H2 Atmosphere
- 1 December 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (12R)
- https://doi.org/10.1143/jjap.33.6656
Abstract
The preparation of electrochromic nickel oxide ( NiO x ) films, which are colorless in an as-deposited state, has been carried out in Ar/O2/H2 mixed gas by the rf-sputtering method. Highly transparent films of as-deposited nickel oxide could be prepared in the sputtering atmosphere consisting of Ar:O2:H2=50:10:40. From IR and XPS measurements, the as-deposited films were found to be hydrated and to have the component of Ni(OH)2. When these films were electrochemically colored, NiOOH was known to remain in the films. The coloration efficiency of the films at the wavelength of 633 nm was nearly independent of hydrogen content in sputtering atmosphere up to 40%, but it depended on sputtering pressure. The maximum value of coloration efficiency was 36 cm2/C for films prepared at hydrogen content of 40% and total pressure of 8 Pa.Keywords
This publication has 11 references indexed in Scilit:
- Characterization of evaporated nickel oxide and its application to electrochromic glazingSolar Energy Materials and Solar Cells, 1993
- Infrared reflectance spectroscopy of electrochromic NiOxHy films made by reactive dc sputteringJournal of Materials Research, 1991
- In-situ spectroscopic studies of electrochromic hydrated nickel oxide filmsSolar Energy Materials, 1989
- Angle-resolved infrared spectroelectrochemistry. 1. An in situ study of thin-film nickel oxide electrodesLangmuir, 1989
- Electrochromic properties of sputtered nickel-oxide filmsJournal of Applied Physics, 1988
- The electrochromic properties of hydrous nickel oxideSolar Energy Materials, 1987
- Spectroscopic and electrochemical studies of electrochromic hydrated nickel oxide filmsSolar Energy Materials, 1987
- Optical properties of electrochromic hydrated nickel oxide coatings made by rf sputteringApplied Optics, 1987
- Electrochromic hydrated nickel oxide coatings for energy efficient windows: Optical properties and coloration mechanismApplied Physics Letters, 1986
- Review of the structure and the electrochemistry of nickel hydroxides and oxy-hydroxidesJournal of Power Sources, 1982