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Measurement of Thickness and Refractive Index of Oxide Films on Silicon
Home
Publications
Measurement of Thickness and Refractive Index of Oxide Films on Silicon
Measurement of Thickness and Refractive Index of Oxide Films on Silicon
GB
G. R. Booker
G. R. Booker
CB
C. E. Benjamin
C. E. Benjamin
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1 January 1962
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 109
(12)
,
1206
https://doi.org/10.1149/1.2425277
Abstract
No abstract available
Keywords
REFRACTIVE INDEX
OXIDE FILMS
FILMS ON SILICON
THICKNESS AND REFRACTIVE
INDEX OF OXIDE
Cited by 18 articles