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An isolation-merged vertical capacitor cell for large capacity DRAM
Home
Publications
An isolation-merged vertical capacitor cell for large capacity DRAM
An isolation-merged vertical capacitor cell for large capacity DRAM
SN
S. Nakajima
S. Nakajima
KM
K. Miura
K. Miura
KM
K. Minegishi
K. Minegishi
TM
T. Morie
T. Morie
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1 January 1984
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
https://doi.org/10.1109/iedm.1984.190691
Abstract
No abstract available
Keywords
LARGE CAPACITY
ISOLATION MERGED VERTICAL
CAPACITOR CELL
VERTICAL CAPACITOR
CAPACITY DRAM
Cited by 17 articles