Atomic force acoustic microscopy methods to determine thin-film elastic properties
- 29 July 2003
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 94 (4), 2347-2354
- https://doi.org/10.1063/1.1592632
Abstract
We discuss atomic force acoustic microscopy (AFAM) methods to determine quantitative values for the elastic properties of thin films. The AFAM approach measures the frequencies of an AFM cantilever’s first two flexural resonances while in contact with a material. The indentation modulus M of an unknown or test material can be obtained by comparing the resonant spectrum of the test material to that of a reference material. We examined a niobium film with AFAM using two separate reference materials and two different cantilever geometries. Data were analyzed by two methods: an analytical model based on conventional beam dynamics, and a finite element method that accommodated variable cantilever cross section and viscous damping. AFAM values of M varied significantly depending on the specific experimental configuration and analysis technique. By averaging values obtained with both reference materials, very good agreement (5–10 % difference) with values determined by other methods was achieved. These results provide insight into using AFAM methods to attain reliable, accurate measurements of elastic properties on the nanoscale.
Keywords
This publication has 10 references indexed in Scilit:
- Measurement of Young's modulus of clay minerals using atomic force acoustic microscopyGeophysical Research Letters, 2002
- Imaging and measurement of local mechanical material properties by atomic force acoustic microscopySurface and Interface Analysis, 2002
- Sensitivity of flexural and torsional vibration modes of atomic force microscope cantilevers to surface stiffness variationsNanotechnology, 2001
- Surface acoustic wave methods to determine the anisotropic elastic properties of thin films*Measurement Science and Technology, 2001
- Quantitative determination of contact stiffness using atomic force acoustic microscopyUltrasonics, 2000
- Quantitative material characterization by ultrasonic AFMSurface and Interface Analysis, 1999
- High-frequency response of atomic-force microscope cantileversJournal of Applied Physics, 1997
- Indentation modulus of elastically anisotropic half spacesPhilosophical Magazine A, 1993
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992
- Elastic Moduli of Silicon vs Hydrostatic Pressure at 25.0°C and − 195.8°CJournal of Applied Physics, 1964