An X-Ray Method for Measuring the Thickness of Thin Crystalline Films
- 1 November 1946
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 17 (11), 874-878
- https://doi.org/10.1063/1.1707656
Abstract
When x‐rays are scattered from a thin crystalline surface film overlying a crystalline base material, diffraction lines are observed from both materials. Equations are developed for the general case of (1) a flat sample and (2) a cylindrical sample expressing the ratio of line intensities from the two materials as a function of film thickness. A usable range of 10−6 cm to 5×10−2 cm is indicated. Experimental confirmation is found in the range 10−4 cm to 6×10−3 cm.Keywords
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