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RF-driven source of superthermal oxygen atoms
Home
Publications
RF-driven source of superthermal oxygen atoms
RF-driven source of superthermal oxygen atoms
RM
R. W. Motley
R. W. Motley
JC
J. W. Cuthbertson
J. W. Cuthbertson
WL
W. D. Langer
W. D. Langer
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1 January 1989
proceedings article
Published by
AIP Publishing
in
AIP Conference Proceedings
Vol. 190
(1)
,
454-457
https://doi.org/10.1063/1.38538
Abstract
An intense (4 ampere) low energy oxygen beam has been developed by neutralizing an oxygen plasma on a biased molybdenum plate. The plasma was exicted by a 1 kW, 2.45 GHz coaxial source in a 4 kG field.
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