Electrical insulating properties and thermal stability of r.f.-sputtered alumina coatings
- 12 April 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 126 (1-2), 43-49
- https://doi.org/10.1016/0040-6090(85)90173-7
Abstract
No abstract availableKeywords
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