Feasibility study of TFT-LCD array tester using low voltage micro-columns
- 30 June 2008
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 85 (5-6), 782-786
- https://doi.org/10.1016/j.mee.2007.12.042
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- High-Beam-Current Microcolumns with Large AperturesJapanese Journal of Applied Physics, 2004
- Advances in arrayed microcolumn lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Experimental evaluation of a 20×20 mm footprint microcolumnJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Electron-beam microcolumns for lithography and related applicationsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996