Laser Machining of Thin Films and Integrated Circuits
- 1 March 1968
- journal article
- website
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Bell System Technical Journal
- Vol. 47 (3), 385-405
- https://doi.org/10.1002/j.1538-7305.1968.tb00049.x
Abstract
The feasibility of using the YAG laser as a tool to thermally machine integrated circuits has been studied. Results suggest that defining the resistor geometry, trimming the resistors to value, fabricating gap capacitors, and defining interconnecting...Keywords
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