An improved form of the oscillating electron electrostatic ion source for ion etching
- 1 October 1974
- Vol. 24 (10), 483-487
- https://doi.org/10.1016/0042-207x(74)90014-1
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Modes of operation of an electrostatic ion gunJournal of Physics D: Applied Physics, 1973
- Ion beam polishing of glassMaterials Research Bulletin, 1972
- A Charged Particle OscillatorJournal of Vacuum Science and Technology, 1972
- Thin foils of non-metals made for electron microscopy by sputter-etchingJournal of Materials Science, 1970