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Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy
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Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy
Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy
DR
D. Rudolph
D. Rudolph
BN
B. Niemann
B. Niemann
GS
G. Schmahl
G. Schmahl
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24 March 1982
proceedings article
Published by
SPIE-Intl Soc Optical Eng
Vol. 0316
,
103-106
https://doi.org/10.1117/12.933141
Abstract
Procedures are described to make sputtered sliced zone plates. These systems are under development for a resolution range of 10 nm ≤ d ≤ 50 nm.
Keywords
PROCEDURES
SPUTTERED SLICED ZONE
SLICED ZONE PLATES
RESOLUTION RANGE
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Cited by 39 articles