A simple signal analyser for deep-level trap spectroscopy
- 1 October 1977
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 10 (10), 1016-1018
- https://doi.org/10.1088/0022-3735/10/10/019
Abstract
A simple and inexpensive double sample-and-hold circuit is described. It is intended to operate as a rate discriminator in conjunction with a commercial transient-capacitance meter for impurity and defect studies in semiconductor devices using deep-level trap spectroscopy. Detection limit is 0.1% of background dopant concentration and resolution of five trap levels in the upper half of the silicon band gap is demonstrated.Keywords
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