Characterization of semi-insulating liquid encapsulated Czochralski GaAs by cathodoluminescence
- 1 July 1984
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 45 (1), 66-68
- https://doi.org/10.1063/1.95013
Abstract
Characterization of semi-insulating liquid encapsulated Czochralski GaAs by cathodoluminescence in a scanning electron microscope at liquid He temperatures has revealed that the main residual impurity, carbon, is not distributed homogeneously within the material. This may lead to nonuniformities in the electrical properties of the material.Keywords
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