Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient reflecting grating technique
- 15 February 1995
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 77 (4), 1488-1491
- https://doi.org/10.1063/1.358898
Abstract
The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen‐ion‐implanted and nonimplanted thin‐film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young’s moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.Keywords
This publication has 14 references indexed in Scilit:
- Analysis of Metallic Multilayers Using Hypersonic Surface Waves Induced by Transient Reflecting GratingsJapanese Journal of Applied Physics, 1993
- Linear thermal expansion coefficient and biaxial elastic modulus of diamondlike carbon filmsJournal of Vacuum Science & Technology A, 1993
- Applications of diamond-like carbon thin filmsPhilosophical Transactions A, 1993
- Microhardness and Young’s modulus of diamond and diamondlike carbon filmsJournal of Applied Physics, 1992
- Real-time optical characterization of surface acoustic modes of polyimide thin-film coatingsJournal of Applied Physics, 1992
- Applications of diamond-like carbon films to electronic componentsThin Solid Films, 1992
- Synthesis and characterization of diamond-like carbon films for optical and mechanical applicationsSurface and Coatings Technology, 1992
- Properties of diamond-like carbonSurface and Coatings Technology, 1992
- Raman and resistivity investigations of carbon overcoats of thin-film media: Correlations with tribological propertiesJournal of Applied Physics, 1991
- Laser-induced surface acoustic waves and photothermal surface gratings generated by crossing two pulsed laser beamsApplied Physics Letters, 1990