Elastic modulus as a measure of diamond likeness and hardness of amorphous carbon films
- 31 July 1996
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 5 (9), 914-918
- https://doi.org/10.1016/0925-9635(95)00439-4
Abstract
No abstract availableKeywords
This publication has 21 references indexed in Scilit:
- The deposition mechanism of diamond-like a-C and a-C: HDiamond and Related Materials, 1994
- Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energyPhysical Review B, 1993
- The influence of substrate temperature during ion beam deposition on the diamond-like or graphitic nature of carbon filmsDiamond and Related Materials, 1993
- Microhardness and Young’s modulus of diamond and diamondlike carbon filmsJournal of Applied Physics, 1992
- Determination of elastic modulus and thickness of surface layers by ultrasonic surface wavesThin Solid Films, 1992
- Properties of tetrahedral amorphous carbon prepared by vacuum arc depositionDiamond and Related Materials, 1991
- Vapor deposition processes for amorphous carbon films with sp3 fractions approaching diamondJournal of Applied Physics, 1991
- Biaxial modulus measurement of chemical vapor deposited polycrystalline diamond filmsJournal of Vacuum Science & Technology A, 1991
- Atomic constraint in hydrogenated ‘‘diamond-like’’ carbonApplied Physics Letters, 1991
- Internal stress and elasticity of synthetic diamond filmsApplied Physics Letters, 1990