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Metal Edge Coverage and Control of Charge Accumulation in RF Sputtered Insulators
Home
Publications
Metal Edge Coverage and Control of Charge Accumulation in RF Sputtered Insulators
Metal Edge Coverage and Control of Charge Accumulation in RF Sputtered Insulators
JL
J. S. Logan
J. S. Logan
FM
F. S. Maddocks
F. S. Maddocks
PD
P. D. Davidse
P. D. Davidse
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1 March 1970
journal article
Published by
IBM
in
IBM Journal of Research and Development
Vol. 14
(2)
,
182-191
https://doi.org/10.1147/rd.142.0182
Abstract
No abstract available
Cited by 26 articles