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Characterization of Plasma Silicon Nitride Layers
Home
Publications
Characterization of Plasma Silicon Nitride Layers
Characterization of Plasma Silicon Nitride Layers
WC
W. A. P. Claassen
W. A. P. Claassen
WV
W. G. J. N. Valkenburg
W. G. J. N. Valkenburg
FH
F. H. P. M. Habraken
F. H. P. M. Habraken
YT
Y. Tamminga
Y. Tamminga
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1 December 1983
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 130
(12)
,
2419-2423
https://doi.org/10.1149/1.2119600
Abstract
No abstract available
Cited by 135 articles