Sticking and recombination of the SiH3 radical on hydrogenated amorphous silicon: The catalytic effect of diborane
- 2 March 1989
- journal article
- Published by Elsevier in Surface Science
- Vol. 210 (1-2), 114-128
- https://doi.org/10.1016/0039-6028(89)90106-4
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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