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Do dopant diffusion and drift decide semiconductor device degradation and dimension limits?
Home
Publications
Do dopant diffusion and drift decide semiconductor device degradation and dimension limits?
Do dopant diffusion and drift decide semiconductor device degradation and dimension limits?
IL
Igor Lubomirsky
Igor Lubomirsky
David Cahen
David Cahen
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2 November 2000
journal article
Published by
Elsevier
in
Solid State Ionics
Vol. 136-137
(1-2)
,
559-565
https://doi.org/10.1016/s0167-2738(00)00414-8
Abstract
No abstract available
Keywords
MIXED CONDUCTOR
DEVICE
SEMICONDUCTOR
DOPANT
DIFFUSION
DRIFT
ELECTROMIGRATION
Cited by 4 articles