Substrate Damage in Film Thickness Measurement by Beam Interferometry
- 1 August 1959
- journal article
- Published by Springer Nature in Nature
- Vol. 184 (4683), 354-355
- https://doi.org/10.1038/184354b0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Obtaining Low Orders of Interference in Measuring Film Thicknesses by Multiple Beam InterferometryJournal of the Optical Society of America, 1958
- Errors in the Measurement of Film Thickness by Multiple-Beam InterferometryNature, 1958
- The Thickness Measurement of Thin Films by Multiple Beam InterferometryJournal of Applied Physics, 1950