Voltage-biased TES bolometers for the far-infrared to millimeter wavelength range

Abstract
We report on the development of arrays of Transition-Edge Sensor (TES) bolometers. We describe several architectures including planar-antenna-coupled, horn-coupled, and absorber-coupled devices. Antenna coupling can greatly simplify the fabrication of multi-frequency bolometer arrays compared to techniques in common use. Planar antennas are intrinsically polarization sensitive and are a promising technology for measurements of CMB polarization. We have designed a prototype device with a double-slot dipole antenna, integrated band-defining filters, and a membrane-suspended bolometer. A test chip has been constructed. We are developing 300-1000 element arrays of horn-coupled TES bolometers with spider-web absorbers for galaxy cluster searches using the Sunyaev-Zel'dovich effect. Finally, we describe a filled absorber-coupled array design that is built using a single silicon wafer. Such arrays are well suited for far-infrared and sub-millimeter observations such as those from SOFIA and future orbital missions.