High-Voltage Electron Microscopy
- 1 June 1966
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 37 (7), 2900-2907
- https://doi.org/10.1063/1.1782147
Abstract
An increase of the acceleration voltage in conventional transmission microscopy yields reduced damage to the specimen and a potentially higher resolving power, and permits an increase in specimen thickness. These gains as a function of voltage are discussed and partly confirmed by experiments. The differential gains above 500 kV are very small, yet costly. A range up to 1000 kV for conventional high-voltage electron microscopy can be recommended.Keywords
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