Residual stress in PZT thin films prepared by pulsed laser deposition
- 23 October 2002
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 162 (2-3), 202-211
- https://doi.org/10.1016/s0257-8972(02)00581-9
Abstract
No abstract availableKeywords
This publication has 18 references indexed in Scilit:
- Sol–gel derived nanocrystalline thin films of PbTiO3 on glass substrateThin Solid Films, 2000
- Relationship between domain structure and film thickness in epitaxial PbTiO3 films deposited on MgO(001) by reactive sputteringJournal of Materials Research, 1999
- Ferroelectric Ceramics: History and TechnologyJournal of the American Ceramic Society, 1999
- Oriented PbZrxTi1−xO3 thin films obtained at low substrate temperature by pulsed laser depositionThin Solid Films, 1997
- Electrical properties and mechanical stress of thick plasma-sprayed Pb(Zr0.58Ti0.42)O3 coatingsPhysica Status Solidi (a), 1996
- A systematic study on structural and dielectric properties of lead zirconate titanate/(Pb,La)(Zr(1−x)Ti(x))O3 thin films deposited by metallo-organic decomposition technologyJournal of Applied Physics, 1996
- The thermomechanical integrity of thin films and multilayersActa Metallurgica et Materialia, 1995
- Preparation and electrical properties of MOCVD-deposited PZT thin filmsJournal of Applied Physics, 1991
- Mixed Mode Cracking in Layered MaterialsPublished by Elsevier ,1991
- Measurement of Residual Stresses in Coatings on Brittle Substrati by Indentation FractureJournal of the American Ceramic Society, 1987