Real-Time Analysis Of In-Situ Spectroscopic Ellipsometric Data During Mbe Growth Of III-V Semiconductors
- 1 January 1991
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Automatic rotating element ellipsometers: Calibration, operation, and real-time applicationsReview of Scientific Instruments, 1990
- Application of ellipsometry to crystal growth by organometallic molecular beam epitaxyApplied Physics Letters, 1990
- Fundamentals and applications of variable angle spectroscopic ellipsometryMaterials Science and Engineering B, 1990