The Al‐Ga‐Sb Ternary Phase Diagram and Its Application to Liquid Phase Epitaxial Growth

Abstract

[[abstract]]The ternary phase diagram of the Al-Ga-Sb system was established inthe Ga-rich region. Liquidus isotherms at 400°, 450°, 500°, and 550°C andsolidus isotherms at 500° and 550°C were determined experimentally. Underthe assumptions that the ternary liquid is a simple solution and that the AlSb-GaSbsolid forms an ideal solution, excellent agreement was obtained betweenthe calculated liquidus and solidus isotherms and experiment. The compositionalvariation of the AlxGa1–xSb epitaxial layers during growth wasdelineated.[[fileno]]2030161010197[[department]]電機工程學