Investigation of high rate magnetron sputtering of niobium films for Josephson integrated circuits
- 1 May 1983
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 19 (3), 946-950
- https://doi.org/10.1109/tmag.1983.1062556
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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