Silicon resistor to measure temperature during rapid thermal annealing
- 1 January 1988
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 59 (1), 182-183
- https://doi.org/10.1063/1.1140004
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Kinetics and moving species during Co2Si formation by rapid thermal annealingJournal of Applied Physics, 1987
- Short Time AnnealingJournal of the Electrochemical Society, 1983
- A review of some charge transport properties of siliconSolid-State Electronics, 1977