Nanometer lithography with the scanning tunneling microscope
- 1 May 1985
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 46 (9), 832-834
- https://doi.org/10.1063/1.95900
Abstract
Nanometer structures have been produced with the scanning tunneling microscope. These structures have been identified by high resolution scanning electron microscopy. This effect seems to have a potential in high resolution microfabrication of semiconductor and superconductor devices.Keywords
This publication has 1 reference indexed in Scilit:
- Microfabrication as a Scientific ToolScience, 1983