THIN FILM CHARACTERIZATION BY ELECTRON MICROPROBE AND ELLIPSOMETRY: SiO2 FILMS ON SILICON
- 15 January 1969
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 14 (2), 43-45
- https://doi.org/10.1063/1.1652704
Abstract
A combined electron microprobe and ellipsometric study of thin SiO2 films on silicon provides a technique for compositional and morphological characterization of thin films.Keywords
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